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Precision Micro Structures
DRC offers high aspect ratio
micromechanical parts (gears, cams, springs and coils), which
are produced by electroforming, ion beam etching, LIGA, and
other processes.
Three-Dimensional Electroformed
Micro-Structure Capability
DRC's Metrigraphics Division has
developed a process capability for the manufacture of high
aspect ratio three-dimensional microstructures. These
microstructures are intended for applications such as:
- Microembossing Molds (for
microfluidics and LCD flat panel arrays)
- Monofilament Supports (mechanical
retainers for fiber or lenses in optical networks)
- Micro Springs (for electrical
contacts and circuit testers)
The microstructures can be free-standing
or permanently bonded to silicon wafers or any relatively
smooth substrate. We have built microstructures
with features as small as 0.002mm and aspect ratios as high
as 20:1. (See chart below for aspect ratio guidelines.) This
capability relies on a variety of commercially available photoresists and Metrigraphics' considerable experience in
photolithography, thin-film deposition, electroplating and
recently developed proprietary processes for these
microstructures.

Microembosser |

Fiber Optic Clip |
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